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Proceedings Paper

Stability of krypton fluoride laser in real stepper mode operation
Author(s): Masahiko Kowaka; Yukio Kobayashi; Osamu Wakabayashi; Noritoshi Ito; Junichi Fujimoto; Takanobu Ishihara; Hiroaki Nakarai; Hakaru Mizoguchi; Yoshiho Amada; Yasuhiro Nozue
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Paper Abstract

The stable performance of the line-narrowed Krypton Fluoride Excimer Laser for production steppers, the KLES-G6, in real stepper mode operation is presented. Wavelength stability of < +/- 0.1 pm and pulse-to-pulse energy stability of < 2% ((sigma) ) were achieved in the real stepper mode operation. Further the durability test was made at 6 W(10 mJ, 600 Hz) in 1 sec. ON - 1 sec. OFF (50%) burst mode and in cw mode. The central wavelength stability < +/- 0.2 pm including the drift at the head of burst, spectral bandwidth < 1.5 pm, and pulse-to-pulse energy stability < 2.5% ((sigma) ) over 1.6 X 109 shots were achieved. The KLES-G6 will assist us to utilize the excimer stepper in real commercial production successfully.

Paper Details

Date Published: 8 August 1993
PDF: 11 pages
Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); doi: 10.1117/12.150429
Show Author Affiliations
Masahiko Kowaka, Komatsu Ltd. (Japan)
Yukio Kobayashi, Komatsu Ltd. (Japan)
Osamu Wakabayashi, Komatsu Ltd. (Japan)
Noritoshi Ito, Komatsu Ltd. (Japan)
Junichi Fujimoto, Komatsu Ltd. (Japan)
Takanobu Ishihara, Komatsu Ltd. (Japan)
Hiroaki Nakarai, Komatsu Ltd. (Japan)
Hakaru Mizoguchi, Komatsu Ltd. (Japan)
Yoshiho Amada, Komatsu Ltd. (Japan)
Yasuhiro Nozue, Komatsu Ltd. (Japan)

Published in SPIE Proceedings Vol. 1927:
Optical/Laser Microlithography
John D. Cuthbert, Editor(s)

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