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Proceedings Paper

Obtaining process information from defect detection data to focus defect reduction programs in the fab environment
Author(s): Patricia Gabella; Elizabeth A. Knowles
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Paper Abstract

This paper presents an in-line monitoring scheme and zone partitioning experiment. An automated laser based wafer inspection system, linked with a defect data management station was integrated into the fab process flow as part of a defect reduction strategy. The results emphasize the feasibility of such a strategy as well as the ease of integration once such a strategy is established.

Paper Details

Date Published: 4 August 1993
PDF: 9 pages
Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); doi: 10.1117/12.148986
Show Author Affiliations
Patricia Gabella, Motorola, Inc. (United States)
Elizabeth A. Knowles, Tencor Instruments (United States)

Published in SPIE Proceedings Vol. 1926:
Integrated Circuit Metrology, Inspection, and Process Control VII
Michael T. Postek, Editor(s)

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