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Proceedings Paper

Images of dielectric film structures on reflecting substrates
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Paper Abstract

A rigorous numerical technique to calculate images of optically thick one-dimensional objects as formed by an optical scanning microscope is presented. The geometry of the selected system allows us to simulate microscopes in various modes of image formation (coherent, partially coherent, bright-field, dark-field, and confocal). We consider the cases of s- and p- polarized illumination. The samples consist of dielectric film structures deposited on perfectly conducting flat substrates, and are characterized by the surface profile, the film thickness, and the complex refractive index of the dielectric. Examples of bright-field coherent images calculated with this technique are shown.

Paper Details

Date Published: 4 August 1993
PDF: 9 pages
Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); doi: 10.1117/12.148944
Show Author Affiliations
J. Felix Aguilar, CICESE (Mexico)
Eugenio R. Mendez, CICESE (Mexico)

Published in SPIE Proceedings Vol. 1926:
Integrated Circuit Metrology, Inspection, and Process Control VII
Michael T. Postek, Editor(s)

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