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Proceedings Paper

Laser technologies for micro-optics fabrication
Author(s): Vadim P. Veiko; Alexei K. Kromin; Evgeny B. Yakovlev
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Paper Abstract

Here we try to summarize modern views on physical essence and technical opportunities of different laser technologies for MOC fabrication. This paper based previously on our own investigations made at the Laser Technologies Chair of IFMO, St. Petersburg and sometimes on the experience of other authors.

Paper Details

Date Published: 15 July 1993
PDF: 10 pages
Proc. SPIE 1874, Infrared and Millimeter-Wave Engineering, (15 July 1993);
Show Author Affiliations
Vadim P. Veiko, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Alexei K. Kromin, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Evgeny B. Yakovlev, St. Petersburg Institute of Fine Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 1874:
Infrared and Millimeter-Wave Engineering
Harold T. Buscher, Editor(s)

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