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Proceedings Paper

Formation of microrelief on silicon surface under action of radiation pulses with different polarization
Author(s): Vladimir S. Makin; Oleg P. Gashkov; Mikhail N. Libenson; Vladimir V. Trubaev
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Paper Abstract

The regular structures formation on a silicon surface under the millisecond pulse of linear- polarized, circular-polarized and unpolarized Nd-laser light irradiation has been studied experimentally. The surface structures induced by the interference of incident wave and surface electromagnetic waves and also the double- and triple-period structures with periods d equals 2 - 3 microns were observed in the nonhomogeneous melting regime. The diffraction pattern separation at higher incident fluence and incident angles have been observed. The main peculiarities of the surface structures formation were explained by polaritonic mechanism.

Paper Details

Date Published: 24 June 1993
PDF: 10 pages
Proc. SPIE 1856, Laser Radiation Photophysics, (24 June 1993); doi: 10.1117/12.147625
Show Author Affiliations
Vladimir S. Makin, S. I. Vavilov State Optical Institute (Russia)
Oleg P. Gashkov, S. I. Vavilov State Optical Institute (Russia)
Mikhail N. Libenson, S. I. Vavilov State Optical Institute (Russia)
Vladimir V. Trubaev, S. I. Vavilov State Optical Institute (Russia)

Published in SPIE Proceedings Vol. 1856:
Laser Radiation Photophysics
Bodil Braren; Mikhail N. Libenson, Editor(s)

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