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Proceedings Paper

Supersmooth surface profile on-line testing
Author(s): Dawei Tu; Yongmo Zhuo; Zukang Lu
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Paper Abstract

An optical non-contact profilometer is presented for in-process measurement of super-smooth surfaces, applying a common-path interferometer and signal correlation processing technique. Environmental disturbation and laser amplitude noise, which commonly exist in similar instruments are overcome in the system. The overall simplicity of the optics and electronics, the low cost of components and the ease of alignment make this a convenient system to implement.

Paper Details

Date Published: 28 May 1993
PDF: 10 pages
Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); doi: 10.1117/12.145567
Show Author Affiliations
Dawei Tu, Zhejiang Univ. (China)
Yongmo Zhuo, Zhejiang Univ. (China)
Zukang Lu, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 1821:
Industrial Applications of Optical Inspection, Metrology, and Sensing
Gordon M. Brown; Kevin G. Harding; H. Philip Stahl, Editor(s)

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