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Proceedings Paper

Registration error measurements with coherent optical processors
Author(s): Xian-Yang Cai; Frank Kvasnik; Roy W. Blore
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Paper Abstract

A microscope coherent optical processor (M-COP) has been specifically applied to the measurement of registration error in multi-layer integrated circuit wafers. This novel technique has resulted in a simple and elegant method for the inspection of both part- and fully-processed semiconductor wafers. The conventional methods of processed wafer inspection comprise of microscopical examination by skilled operators, extensive electrical parameter testing, and numerical image-processing. To apply any one of these techniques to a single chip on a wafer is extremely time consuming, and the number of samples that can be inspected on a production line is severely limited. However, real-time 100% inspection of wafers is one of the benefits of the inherent high resolution and immense speed of the M-COP. Further benefits are the early detection and location of faults, 100% quality assurance, and continuous condition monitoring.

Paper Details

Date Published: 6 May 1993
PDF: 12 pages
Proc. SPIE 1907, Machine Vision Applications in Industrial Inspection, (6 May 1993);
Show Author Affiliations
Xian-Yang Cai, Univ. of Manchester (United Kingdom)
Frank Kvasnik, Univ. of Manchester (United Kingdom)
Roy W. Blore, Univ. of Manchester (United Kingdom)

Published in SPIE Proceedings Vol. 1907:
Machine Vision Applications in Industrial Inspection
Frederick Y. Wu; Benjamin M. Dawson, Editor(s)

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