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Proceedings Paper

Compact excimer laser system
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Paper Abstract

This paper describes the design and operating characteristics of a KrF laser which operates at variable pulse repetition rates up to 100 pps.

Paper Details

Date Published: 4 May 1993
PDF: 4 pages
Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144676
Show Author Affiliations
Dumitru Dragulinescu, Institute of Atomic Physics (Romania)
Constantin Grigoriu, Institute of Atomic Physics (Romania)
L. Tobos, Institute of Atomic Physics (Romania)

Published in SPIE Proceedings Vol. 1810:
9th International Symposium on Gas Flow and Chemical Lasers
Costas Fotakis; Costas Kalpouzos; Theodore G. Papazoglou, Editor(s)

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