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Proceedings Paper

High average power XeCl excimer laser
Author(s): Bernard Lacour; Henri Brunet; Herve Besaucele; Claude Gagnol
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Paper Abstract

We have developed a high repetition rate, high average power excimer laser intended for industrial applications. The system operates in the phototriggered mode and is capable of continuous operation at repetition rates up to 700 Hz. A compact closed loop gas recirculation system, driven by two centrifugal blowers is employed, providing gas flow velocities up to 35 m/s. The laser delivers a maximum average output power of more than 500 W at 308 nm wavelength.

Paper Details

Date Published: 4 May 1993
PDF: 4 pages
Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144666
Show Author Affiliations
Bernard Lacour, Laserdot (France)
Henri Brunet, Laserdot (France)
Herve Besaucele, Laserdot (United States)
Claude Gagnol, Laserdot (France)

Published in SPIE Proceedings Vol. 1810:
9th International Symposium on Gas Flow and Chemical Lasers
Costas Fotakis; Costas Kalpouzos; Theodore G. Papazoglou, Editor(s)

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