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Proceedings Paper

Quality control during excimer laser material processing
Author(s): Manfred Geiger; Norbert Lutz; Thomas Rebhan; Joachim Hutfless
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Paper Abstract

Excimer lasers prove to be useful tools for precise structuring and uniform surface modification of thin surface layers of ceramics, glasses, and composites. They provide high energy laser pulses and a uniform intensity distribution. Processing quality is strongly affected by laser and process parameters. It is demonstrated that the integration of diagnostics in an excimer laser processing system results in an optimization of processing quality by appropriate choice of the process parameters.

Paper Details

Date Published: 4 May 1993
PDF: 4 pages
Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144562
Show Author Affiliations
Manfred Geiger, Univ. Erlangen-Nuernberg (Germany)
Norbert Lutz, Univ. Erlangen-Nuernberg (Germany)
Thomas Rebhan, Univ. Erlangen-Nuernberg (Germany)
Joachim Hutfless, Univ. Erlangen-Nuernberg (Germany)

Published in SPIE Proceedings Vol. 1810:
9th International Symposium on Gas Flow and Chemical Lasers
Costas Fotakis; Costas Kalpouzos; Theodore G. Papazoglou, Editor(s)

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