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Proceedings Paper

Efficient line narrowing and wavelength stabilization of excimer lasers
Author(s): Malcolm C. Gower; C. Williams; Paul Apte; Phil T. Rumsby
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Paper Abstract

Efficient line-narrowing at 308, 248 and 193 nm is reported using intracavity etalons in commercial excimer lasers. With a single etalon the linewidth is reduced by a factor of X10 - 20 at each wavelength. The line-narrowing efficiency can then be as high as 60 - 75% of the broadband output and single pulse energies in the range of 200 - 300 mJ can be produced within a linewidth of approximately 20 pm. With two intracavity etalons the linewidth is restricted a further factor of approximately X10 with line-narrowing efficiencies of 15 - 25%. At all wavelengths single pulse energies of 60 - 100 mJ could readily be produced within 2 - 3 pm. Using an laser spectrometer with a 1-D diode array readout and PC interface, the wavelength of such a line-narrowed KrF laser has been actively locked to the stable line output from a HeNe laser.

Paper Details

Date Published: 19 April 1993
PDF: 11 pages
Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143048
Show Author Affiliations
Malcolm C. Gower, Exitech Ltd. (United Kingdom)
C. Williams, Exitech Ltd. (United Kingdom)
Paul Apte, Exitech Ltd. (United Kingdom)
Phil T. Rumsby, Exitech Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 1835:
Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
James A. Greer, Editor(s)

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