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Proceedings Paper

Modeling of high-density plasma sources
Author(s): David B. Graves; Han-Ming Wu; Robert K. Porteous
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Paper Abstract

The two-dimensional, axisymmetric model of a bounded, partially ionized, magnetized glow discharge plasma is presented. The model treats positive ions as particles and electrons as a fluid in a hybrid configuration. The results reported here are directed towards simulating an electron cyclotron resonance (ECR), microwave-sustained plasma. Results include predictions of plasma density and potential, electron temperature and ion flux and energy. Models such as the one presented here have the potential to be used by plasma process engineers and plasma tool designers.

Paper Details

Date Published: 16 April 1993
PDF: 12 pages
Proc. SPIE 1803, Advanced Techniques for Integrated Circuit Processing II, (16 April 1993); doi: 10.1117/12.142910
Show Author Affiliations
David B. Graves, Univ. of California/Berkeley (United States)
Han-Ming Wu, Univ. of California/Berkeley (United States)
Robert K. Porteous, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 1803:
Advanced Techniques for Integrated Circuit Processing II
James A. Bondur; Gary Castleman; Lloyd R. Harriott; Terry R. Turner, Editor(s)

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