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Proceedings Paper

Excimer laser ablation of Cr-contaminated polyimide
Author(s): Gouri Radhakrishnan; Nicholas Marquez
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Paper Abstract

Excimer laser radiation at 193 and 248 nm has been used for the maskless and selective removal of chromium (Cr) contaminants present on polyimide surfaces with fine-line gold (Au) metallization features patterned on them. Excimer laser cleaning has been successful in restoring the dielectric performance of these polyimide surfaces. The differences in ablation thresholds and rates and the respective process windows, established at 193 and 248 nm, for the removal of Cr are discussed.

Paper Details

Date Published: 16 March 1993
PDF: 8 pages
Proc. SPIE 1804, Rapid Thermal and Laser Processing, (16 March 1993); doi: 10.1117/12.142084
Show Author Affiliations
Gouri Radhakrishnan, The Aerospace Corp. (United States)
Nicholas Marquez, The Aerospace Corp. (United States)

Published in SPIE Proceedings Vol. 1804:
Rapid Thermal and Laser Processing
Dim-Lee Kwong; Heinrich G. Mueller, Editor(s)

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