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Proceedings Paper

Scanning laser microscopy and laser thermal imaging
Author(s): Guanqi Yue; Yungang Nie
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Paper Abstract

Besides some advantages over conventional optical microscopes, a scanning laser imaging system is the basis of developing another kind of imaging system i.e., a laser-thermal imaging system. The latter provides thermal images reflecting distribution of thermal properties, such as thermal conductivity of the sample, thus it makes imaging of some material parameters other than optical properties possible. Principle and structure of such a laser-thermal imaging system is described and images of ion implantation dose density in crystal obtained from this system are given.

Paper Details

Date Published: 1 April 1993
PDF: 7 pages
Proc. SPIE 1982, Photoelectronic Detection and Imaging: Technology and Applications '93, (1 April 1993); doi: 10.1117/12.142076
Show Author Affiliations
Guanqi Yue, Tsinghua Univ. (China)
Yungang Nie, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 1982:
Photoelectronic Detection and Imaging: Technology and Applications '93
LiWei Zhou, Editor(s)

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