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Proceedings Paper

One-step stripe waveguide fabrication process for polymer integrated optics
Author(s): Alan C. G. Nutt
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Paper Abstract

Single-mode stripe optical waveguides in poled organic thin films have been fabricated by excimer laser photoablation using wavelengths at 248 nm and 193 nm. The process uses a quartz proximity photomask as a stencil to the collimated laser light. The process also requires relatively low light densities (approximately 20 mJ/cm2) allowing large areas to be processed with currently available excimer lasers. This one-step process allows the definition of intricate structures without altering film alignment properties necessary to utilize the inherent electro-optic effect. Possible distortion of waveguide structures caused by diffraction elements (such as in waveguide Y-junctions) is examined. Active devices exhibit electro-optic coefficients similar to equivalent planar waveguide devices.

Paper Details

Date Published: 6 April 1993
PDF: 13 pages
Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); doi: 10.1117/12.141909
Show Author Affiliations
Alan C. G. Nutt, Eastman Kodak Co. (United States)

Published in SPIE Proceedings Vol. 1794:
Integrated Optical Circuits II
Ka-Kha Wong, Editor(s)

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