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Proceedings Paper

Micromachined silicon accelerometer with fiber optic interrogation
Author(s): Deepak G. Uttamchandani; Dawei Liang; Brian Culshaw
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Paper Abstract

Silicon micromechanics technology has formed the basis of a range of compact and reliable sensors, measuring variables such as pressure, force and acceleration. Most micromechanical sensors require some form of electrical read-out. Therefore, these sensors are classified as electrically active. Electrically passive sensors also have many applications, and the best examples of such sensors are those based on fiber optic technology. In this paper, we describe a sensor which combines the advantages of both silicon micromechanics and fiber optics. Specifically, an accelerometer has been fabricated, and initial results on the performance of this device are presented.

Paper Details

Date Published: 2 March 1993
PDF: 7 pages
Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); doi: 10.1117/12.141227
Show Author Affiliations
Deepak G. Uttamchandani, Univ. of Strathclyde (United Kingdom)
Dawei Liang, Univ. of Strathclyde (United Kingdom)
Brian Culshaw, Univ. of Strathclyde (United Kingdom)

Published in SPIE Proceedings Vol. 1793:
Integrated Optics and Microstructures
Massood Tabib-Azar; Dennis L. Polla, Editor(s)

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