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Proceedings Paper

Silicon integrated microsensors
Author(s): Khalil Najafi
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Paper Abstract

This paper reviews the field of silicon-based integrated microsensors. These devices are implemented using fabrication technologies developed for integrated circuits, and lend themselves easily to low cost and high volume production. They are typically much smaller, more precise and stable, have less drift, and are much more reliable than their discrete counterparts. The addition of on-chip integrated circuits to the silicon sensors enables the processing and amplification of low level signals recorded by the sensors, and allows the device to be more easily interfaced and integrated into an electronic measurement and control system. The fabrication of silicon integrated microsensors is reviewed, and a number of examples are discussed. These examples include a multichannel integrated silicon microprobe for the recording of neural signals form the brain cells, and a multi-element infrared thermal detector based on silicon-gold thermopiles.

Paper Details

Date Published: 2 March 1993
PDF: 12 pages
Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); doi: 10.1117/12.141220
Show Author Affiliations
Khalil Najafi, Univ. of Michigan (United States)

Published in SPIE Proceedings Vol. 1793:
Integrated Optics and Microstructures
Massood Tabib-Azar; Dennis L. Polla, Editor(s)

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