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Proceedings Paper

Micromachined Fabry-Perot interferometer with corrugated silicon diaphragm for fiber optic sensing applications
Author(s): Alexis Mendez; Theodore F. Morse; Keith A. Ramsey
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Paper Abstract

A new design for a miniature Fabry-Perot Interferometer (FPI) mounted on the tip of an optical fiber for sensing applications is presented. The Fabry-Perot Cavity (FPC) is formed by a micromachined corrugated silicon diaphragm anodically bonded to a pyrex substrate. In this way, this devices takes advantage of the sensitivity and selectivity of an optical interferometer combined with the small size, lightweight and EMI immunity properties of optical fibers to create compact, lightweight and almost entirely dielectric sensors for the measurement of pressure, acceleration, sound, electric and magnetic field, etc. in remote, dangerous or inaccessible places. A discussion on the operation and fabrication of the FPC is given, along with experimental results obtained in its application as an electric field sensor.

Paper Details

Date Published: 2 March 1993
PDF: 13 pages
Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); doi: 10.1117/12.141214
Show Author Affiliations
Alexis Mendez, Brown Univ. (United States)
Theodore F. Morse, Brown Univ. (United States)
Keith A. Ramsey, Battelle Memorial Institute (United States)

Published in SPIE Proceedings Vol. 1793:
Integrated Optics and Microstructures
Massood Tabib-Azar; Dennis L. Polla, Editor(s)

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