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Proceedings Paper

Planetary system for high-uniformity deposited layers on large substrates
Author(s): Aime Perrin; Jean-Pierre Gailliard
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Paper Abstract

The thickness uniformity of vacuum deposited layers is a very important parameter for optical coatings. We have developed a computer program for the calculation of the uniformity as a function of the vapor distribution for planetary systems. This program shows the existence of a configuration such as the uniformity is practically independent of the vapor distribution. We give the example of an experimental system for processing four substrates of 300 mm diameter with a uniformity better than +/- 0.3% in a 1 m3 box coater.

Paper Details

Date Published: 4 March 1993
PDF: 7 pages
Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141007
Show Author Affiliations
Aime Perrin, CEA-LETI (France)
Jean-Pierre Gailliard, CEA-LETI (France)

Published in SPIE Proceedings Vol. 1782:
Thin Films for Optical Systems
Karl H. Guenther, Editor(s)

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