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Proceedings Paper

Thin-film filter lifetesting results in the extreme ultraviolet
Author(s): Peter W. Vedder; John V. Vallerga; James L. Gibson; Joseph M. Stock; Oswald H. W. Siegmund
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Paper Abstract

We present the results of the thin film filter lifetesting program conducted as part of the NASA Extreme Ultraviolet Explorer (EUVE) satellite mission. This lifetesting program is designed to monitor changes in the transmission and mechanical properties of the EUVE filters over the lifetime of the mission (fabrication, assembly, launch and operation). Witness test filters were fabricated from thin film foils identical to those used in the flight filters. The witness filters have been examined and calibrated periodically over the past seven years. The filters have been examined for evidence of pinholing, mechanical degradation, and oxidation. Absolute transmissions of the flight and witness filters have been measured in the extreme ultraviolet (EUV) over six orders of magnitude at numerous wavelengths using the Berkeley EUV Calibration Facility.

Paper Details

Date Published: 21 January 1993
PDF: 12 pages
Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); doi: 10.1117/12.140582
Show Author Affiliations
Peter W. Vedder, Univ. of California/Berkeley (United States)
John V. Vallerga, Univ. of California/Berkeley (United States)
James L. Gibson, Univ. of California/Berkeley (United States)
Joseph M. Stock, Univ. of California/Berkeley (United States)
Oswald H. W. Siegmund, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 1742:
Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography
Richard B. Hoover; Arthur B. C. Walker II, Editor(s)

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