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Proceedings Paper

New test facility for reflectivity measurements in the extreme ultraviolet spectral region
Author(s): Paolo Villoresi; Giampiero Naletto; Piergiorgio Nicolosi; Giuseppe Tondello; Ermanno Jannitti
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Paper Abstract

A test facility for measurements of reflectivity of multilayer coated mirrors, in the 30-300 A domain is described. The facility uses as a source of continuum radiation a plasma produced by focusing a laser beam on a target of high Z material. The laser used is a Q-switched Nd-YLF producing pulses of up to 20 J of energy and of 15 ns duration. The radiation reflected by the mirror under test is dispersed by a grazing incidence spectrograph and recorded with an intensified CCD detector. The facility is quite simple to operate and versatile. Examples of measurements from different mirrors in the range 50-130 A taken with the facility are presented.

Paper Details

Date Published: 21 January 1993
PDF: 10 pages
Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); doi: 10.1117/12.140566
Show Author Affiliations
Paolo Villoresi, Univ. di Padova (Italy)
Giampiero Naletto, Univ. di Padova (Italy)
Piergiorgio Nicolosi, Univ. di Padova (Italy)
Giuseppe Tondello, Univ. di Padova (Italy)
Ermanno Jannitti, Istituto Gas Ionizzati C.N.R. (Italy)

Published in SPIE Proceedings Vol. 1742:
Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography
Richard B. Hoover; Arthur B. C. Walker II, Editor(s)

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