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Proceedings Paper

Laser beam writing of computer-generated diffractive optical components
Author(s): Norbert Streibl; M. Heissmeier; Walter P. Hofmann; Ulrich W. Krackhardt; M. Schrader; Johannes Schwider; Martin Sperl
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Paper Abstract

A new pattern generator, initially designed for ASIC fabrication, is employed for writing synthetic holograms and other micro-optical components. The specifications and some limits of this machine have been investigated. Test structures and synthetic holograms are shown. Arbitrary patterns with micron resolution, submicron positioning accuracy, large area (up to 150 X 150 mm2 possible), and good quality of the microprofile were demonstrated.

Paper Details

Date Published: 2 March 1993
PDF: 8 pages
Proc. SPIE 1732, Holographics International '92, (2 March 1993); doi: 10.1117/12.140457
Show Author Affiliations
Norbert Streibl, Univ. Erlangen-Nuernberg (Germany)
M. Heissmeier, Univ. Erlangen-Nuernberg (Germany)
Walter P. Hofmann, Univ. Erlangen-Nuernberg (Germany)
Ulrich W. Krackhardt, Univ. Erlangen-Nuernberg (Germany)
M. Schrader, Univ. Erlangen-Nuernberg (Germany)
Johannes Schwider, Univ. Erlangen-Nuernberg (Germany)
Martin Sperl, Univ. Erlangen-Nuernberg (Germany)

Published in SPIE Proceedings Vol. 1732:
Holographics International '92
Yuri N. Denisyuk; Frank Wyrowski, Editor(s)

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