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Proceedings Paper

Design and fabrication of synthetic lenses in silicon
Author(s): Albert Stemmer; Helmut Zarschizky; Franz Mayerhofer; Guy Lefranc; Hartmut W. Schneider; Peter C. M. Galloway
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Paper Abstract

We report on the design, calculation, and fabrication of binary and multilevel synthetic lenses realized in silicon. The diffractive patterns of the lenses are computer generated, direct E-beam written, and dry etched into the surface of silicon wafers. This paper describes the fabrication tools used and the techniques applied for the lens fabrication. The data processing as well as the efforts necessary for the electron beam writing are emphasized. Binary as well as multilevel elements are fabricated. First results are given for the performance of binary lenses in terms of diffraction efficiency, the efficiency of laser diode to fiber coupling, and the image quality of lenses.

Paper Details

Date Published: 2 March 1993
PDF: 12 pages
Proc. SPIE 1732, Holographics International '92, (2 March 1993); doi: 10.1117/12.140385
Show Author Affiliations
Albert Stemmer, Siemens AG (Germany)
Helmut Zarschizky, Siemens AG (Germany)
Franz Mayerhofer, Siemens AG (Germany)
Guy Lefranc, Siemens AG (Germany)
Hartmut W. Schneider, Siemens AG (Germany)
Peter C. M. Galloway, Hertford College (Germany)

Published in SPIE Proceedings Vol. 1732:
Holographics International '92
Yuri N. Denisyuk; Frank Wyrowski, Editor(s)

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