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Proceedings Paper

Chemical resonant sensors
Author(s): Peter R. Hauptmann
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Paper Abstract

Resonant sensors designed to have a mechanical resonance frequency are a subject of special practical interest. They are sensors with outputs based on a quasi-digital frequency signal which is a great advantage over conventional analog sensors. Micromachined mechanical resonant sensors can be used to replace conventional piezoresistors in precision sensor applications such as pressure sensors and accelerometers. For the detecting of chemical species, only a part of known resonant sensor principles can be used for practical aims. Ultrasonic sensors can be classified in this category. They include BAW-, SAW-, APM-, and FPW-sensors. The theoretical concepts for their behavior and the advantages and disadvantages in comparison with other chemical sensors are discussed. Experimental results with BAW-sensors for gas and under-liquid sensing are given. Finally, the actual situation in research and industrial application of this sensor class is reviewed.

Paper Details

Date Published: 9 March 1993
PDF: 10 pages
Proc. SPIE 1716, International Conference on Monitoring of Toxic Chemicals and Biomarkers, (9 March 1993); doi: 10.1117/12.140266
Show Author Affiliations
Peter R. Hauptmann, Technische Univ. Magdeburg (Germany)

Published in SPIE Proceedings Vol. 1716:
International Conference on Monitoring of Toxic Chemicals and Biomarkers
Tuan Vo-Dinh; Karl Cammann, Editor(s)

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