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Proceedings Paper

New heterodyne interferometer for measuring surface topography
Author(s): Huijie Zhao; Xifu Qiang; Pengsheng Li; Hua Li
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Paper Abstract

A new heterodyne interferometer to measure the surface topography is presented. The internal-mirror He-Ne laser used here has very high frequency difference (500 - 600 MHz). The frequency of this laser is stabilized by an intelligent servo circuit based on thermal negative feedback. Its frequency stabilization is better than 10-8. Besides, an improved interferometer is analyzed which has large measurement scale and is able to measure 3-D surface topography. By using precise phase measuring technique, the system has a height sensitivity of the order of magnitude of angstroms. In addition, the system has good dynamic characteristics.

Paper Details

Date Published: 15 December 1992
PDF: 6 pages
Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); doi: 10.1117/12.139240
Show Author Affiliations
Huijie Zhao, Harbin Institute of Technology (China)
Xifu Qiang, Harbin Institute of Technology (China)
Pengsheng Li, Harbin Institute of Technology (China)
Hua Li, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 1776:
Interferometry: Surface Characterization and Testing
Katherine Creath; John E. Greivenkamp, Editor(s)

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