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Proceedings Paper

ISO figure specification (ISO-10110-5) and digital interferometry
Author(s): Lars A. Selberg; Bruce E. Truax
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Paper Abstract

The ISO standard for optical drawing specification (ISO 10110) includes a part on surface form tolerances (figure error). Standardization of this specification provides a succinct and readily understood nomenclature which will be useful in industry, especially as it is intended to unify visual and digital evaluation. It is a peculiar standard in that it does not control surface form directly, but controls it by its effect in a particular test, interferometric comparison with a 'perfect' reference. The application of this standard to digital interferometry is discussed, including a review of the mechanics of this standard and some examples. ISO 10110-5 is vague on some points and these are discussed. These issues include spatial frequency sampling, specific algorithms for calculating some of these tolerances, measurement accuracy concerns, aspherics and guidelines for determining if digital interferometry is required.

Paper Details

Date Published: 15 December 1992
PDF: 8 pages
Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); doi: 10.1117/12.139230
Show Author Affiliations
Lars A. Selberg, Zygo Corp. (United States)
Bruce E. Truax, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 1776:
Interferometry: Surface Characterization and Testing
Katherine Creath; John E. Greivenkamp, Editor(s)

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