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Proceedings Paper

Characteristics of partial pressure analyzers
Author(s): Charles R. Tilford
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Paper Abstract

Partial pressure or residual gas analyzers are often invaluable for materials and contamination studies. However, some instrument design features and combination of operating parameters can cause performance features quite different from what many users expect. These unexpected performance characteristics can include pressure-dependent sensitivities, the sensitivity for one gas depending on the pressures of other gases, and time-dependent sensitivities after operation with gases such as oxygen or water. These characteristics can greatly complicate instrument calibration and can cause errors as large as two orders of magnitude. This paper discusses measured performance characteristics for different partial pressure analyzers that illustrate a wide range of performances from the different instruments, as well as several features that seem to be common to most instruments.

Paper Details

Date Published: 11 January 1993
PDF: 11 pages
Proc. SPIE 1761, Damage to Space Optics, and Properties and Characteristics of Optical Glass, (11 January 1993); doi: 10.1117/12.138920
Show Author Affiliations
Charles R. Tilford, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 1761:
Damage to Space Optics, and Properties and Characteristics of Optical Glass
James B. Breckinridge; Alexander J. Marker III, Editor(s)

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