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Proceedings Paper

Cooled backside-illuminated CCD for x-ray microscopy application
Author(s): Hiroaki Aritome; Shigeru Nakayama; Guan-ming Zeng; Hiroyuki Daido; Masahiro Nakatsuka; Sadao Nakai; Makoto Sakurai; Koujun Yamashita
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Paper Abstract

In x-ray microscopy applications of CCDs in the water window region, radiation damage in the MOS structure due to x rays is a problem. The backside illuminated CCD is one of the possibilities to solve the problem. This paper reports about a CCD imaging system for x-ray microscopy applications using a backside illuminated CCD (EEV Ltd., CCD 02-06). The system is used for a zone plate x-ray microscope using a laser plasma source. It is effective to take an image with a single x-ray pulse. The dark noise is 1 electron/s/pixel (r.m.s.) at a temperature of -53 degree(s)C. The quantum efficiency is measured between the wavelength of 2.25 - 8 nm.

Paper Details

Date Published: 13 January 1993
PDF: 4 pages
Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); doi: 10.1117/12.138740
Show Author Affiliations
Hiroaki Aritome, Osaka Univ. (Japan)
Shigeru Nakayama, Osaka Univ. (Japan)
Guan-ming Zeng, Osaka Univ. (Japan)
Hiroyuki Daido, Osaka Univ. (Japan)
Masahiro Nakatsuka, Osaka Univ. (Japan)
Sadao Nakai, Osaka Univ. (Japan)
Makoto Sakurai, National Institute for Fusion Science (Japan)
Koujun Yamashita, Institute of Space and Astronautical Science (Japan)

Published in SPIE Proceedings Vol. 1741:
Soft X-Ray Microscopy
Chris J. Jacobsen; James E. Trebes, Editor(s)

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