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Proceedings Paper

Zone plate x-ray microscope using a laser plasma source
Author(s): Hiroaki Aritome; Shigeru Nakayama; Katsumi Mizunoe; Guan-ming Zeng; Hiroyuki Daido; Masahiro Nakatsuka; Sadao Nakai
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Paper Abstract

An imaging x-ray microscope using an incoherent laser plasma source and zone plates is reported. The He-like line of 4.03 nm (1 X 1014 photons/sr/pulse) from a carbon plasma produced by a compact glass laser is used as a source. The x-ray source is monochromatized by a condenser zone plate and a pinhole. As an x-ray image detector, a Kodak 101-07 film and an MCP or a cooled backside illuminated CCD are used. An image of the #1000 copper mesh is obtained by a single x-ray pulse at a magnification of 10 by the CCD. In the case of a singe pulse, the magnification is limited so that enough photons are incident on a pixel of the CCD. Thus, the spatial resolution is limited. Further improvement such as an ellipsoidal mirror with multilayer coating is considered to improve the resolution.

Paper Details

Date Published: 13 January 1993
PDF: 4 pages
Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993);
Show Author Affiliations
Hiroaki Aritome, Osaka Univ. (Japan)
Shigeru Nakayama, Nikon Corp. (Japan)
Katsumi Mizunoe, Nikon Corp. (Japan)
Guan-ming Zeng, Osaka Univ. (Japan)
Hiroyuki Daido, Osaka Univ. (Japan)
Masahiro Nakatsuka, Osaka Univ. (Japan)
Sadao Nakai, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 1741:
Soft X-Ray Microscopy
Chris J. Jacobsen; James E. Trebes, Editor(s)

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