A feasibility study was conducted of a prototype electrostatically suspended micromechanical two-axis gyroscope on a microchip, which is expected to find many applications in commercial, aerospace, and military sectors. Particular attention is given to the microfabrication techniques used for this device, the specifications and the configuration of the gyroscope, the configurations of the motor and the sensor, the electromechanical design, and the control and electronics design. Results of the feasibility study were very promising.

Date Published: 1 July 1992
PDF: 9 pages
Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); doi: 10.1117/12.138139

Published in SPIE Proceedings Vol. 1694:
Sensors and Sensor Systems for Guidance and Navigation II
Sharon S. Welch, Editor(s)