The paper describes the integration of sol-gel ferroelectric thin films into micromachined sensors and optical detectors, devices which are based on the piezoelectric and pyroelectric effects in Pb(Zr(x)Ti(1-x))O3 and PbTiO3 thin films, respectively. The ferroelectric and surface-micromachining technologies are described, which are compatible with 3-micron CMOS technology. At 297 K and a chopping frequency of 50 Hz, the measured blackbody voltage responsivity of a pyroelectric element with an active area of 7 x 10 exp -4 sq cm was 4.2 x 10 exp 4 V/W and the measured normalized detectivity was 1.0 x 10 exp 9 cm sq-rt Hz/W.

Date Published: 1 July 1992
PDF: 11 pages
Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); doi: 10.1117/12.138119

Published in SPIE Proceedings Vol. 1694:
Sensors and Sensor Systems for Guidance and Navigation II
Sharon S. Welch, Editor(s)