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Proceedings Paper

Buffer layers for deposition of superconducting YBaCuO thin film on polycrystalline diamond
Author(s): Charles P. Beetz Jr.; G. J. Cui; B. A. Lincoln; Peter S. Kirlin
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Paper Abstract

In an attempt to combine the properties of high temperature superconductors with the high thermal conductivity and low specific heat of diamond, we have explored the deposition of in- situ YBa2Cu3O7-(delta ) (YBCO) superconducting films on polycrystalline diamond thin films. We demonstrate for the first time superconducting YBCO films on diamond employing multiple layer buffer layer systems. Three different composite buffer layer systems were explored for this purpose: (1) Diamond/Zr/YSZ/YBCO, (2) Diamond/Si3N4/YSZ/YBCO, and (3) Diamond/SiO2/YSZ/YBCO. Adherent thin Zr films were deposited by dc sputtering on the diamond films at 450 to 820 degree(s)C. The yttria stabilized zirconia (YSZ) was deposited by reactive RF sputtering at 680 to 750 degree(s)C. The Si3N4 and SiO2 were also deposited by on-axis RF sputtering at 400 to 700 degree(s)C. YBCO films were grown on the buffer layers by off-axis RF sputtering at substrate temperatures between 690 degree(s)C and 750 degree(s)C. In all cases, the as-deposited YBCO films were superconducting above 77 K. This demonstration enables the fabrication of low heat capacity, fast response time bolometric far IR detectors and paves the way for the use of HTSC as a high frequency interconnect metallization on thick diamond film based multichip modules.

Paper Details

Date Published: 1 September 1992
PDF: 8 pages
Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); doi: 10.1117/12.137792
Show Author Affiliations
Charles P. Beetz Jr., Advanced Technology Materials, Inc. (United States)
G. J. Cui, Advanced Technology Materials, Inc. (United States)
B. A. Lincoln, Advanced Technology Materials, Inc. (United States)
Peter S. Kirlin, Advanced Technology Materials, Inc. (United States)

Published in SPIE Proceedings Vol. 1685:
Infrared Detectors and Focal Plane Arrays II
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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