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Proceedings Paper

Pyroelectric IR single-element detectors and arrays based on LiNbO3 and LiTaO3
Author(s): Volkmar Norkus; Guenter Hofmann; Silke Moehling; Helmut Budzier
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Paper Abstract

Starting from a characterization of the used pyroelectric materials LiNbO3 and LiTaO3 the paper describes the hybrid arrangement and essential properties of realized single- element detectors and arrays. It shows that the design and the production technique of pyroelectric chips have a strong influence on the thermal and spatial resolution of the detectors. This technique includes both the thinning process and reticulation of the chips, for which ion beam milling as a universal method was optimized and used. Single-element detectors with extremely thin, self-supporting LiTaO3 chips (dp < 2 micrometers ) were produced. With a responsive element of 2 X 2 mm2 in area, they have a specific detectivity D* (500 K; 10 Hz; 25 degree(s)C) > 1 X 109 cmHz1/2W-1. Linear arrays with 128 responsive elements of 90 X 100 micrometers 2 element size, 100 micrometers pitch, integrated readout circuit, and coated germanium window have a noise equivalent power (NEP) (500 K; 40 Hz; 25 degree(s)C) of 4 nW. The modulation transfer function MTFS (40 Hz; 31 p/mm; 25 degree(s)C) is 0.15 for pyroelectric chips without isolating grooves and was increased up to 0.45 by means of ion- beam milling of 10 micrometers wide isolating grooves between the responsive elements. First results of two-dimensional arrays with 128 X 128 elements, of 50 micrometers pitch and integrated CCD-readout circuit are presented.

Paper Details

Date Published: 1 September 1992
PDF: 9 pages
Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); doi: 10.1117/12.137791
Show Author Affiliations
Volkmar Norkus, Dresden Univ. of Technology (Germany)
Guenter Hofmann, DIAS Angewandte Sensorik GmbH (Germany)
Silke Moehling, Dresden Univ. of Technology (Germany)
Helmut Budzier, Dresden Univ. of Technology (Germany)

Published in SPIE Proceedings Vol. 1685:
Infrared Detectors and Focal Plane Arrays II
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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