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Proceedings Paper

Multisite on-line process control using a CCD detector system
Author(s): Ishai Nir
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Paper Abstract

Recent advances in both imaging spectrometers and CCD based multichannel detection systems have made possible optical process monitoring and control of several sites simultaneously using a single system. Developments in optical monitoring leading to the present state of technology are reviewed. The benefits of these new multisite systems are discussed both in terms of advances in process control they make possible and the cost reduction they represent.

Paper Details

Date Published: 14 August 1992
PDF: 5 pages
Proc. SPIE 1681, Optically Based Methods for Process Analysis, (14 August 1992); doi: 10.1117/12.137751
Show Author Affiliations
Ishai Nir, Princeton Instruments (United States)

Published in SPIE Proceedings Vol. 1681:
Optically Based Methods for Process Analysis
David S. Bomse; Harry Brittain; Stuart Farquharson; Jeremy M. Lerner; Alan J. Rein; Cary Sohl; Terry R. Todd; Lois Weyer, Editor(s)

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