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Proceedings Paper

Study of large-field beryllium window for SR lithography (Poster Paper)
Author(s): Kouichi Hara; Tohru Itoh
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Paper Abstract

The resisting pressure of deep cylindrical beryllium (Be) windows was studied theoretically and experimentally. A cylindrical Be window (window size, 50 X 50 mm2; thickness, 20 micrometers ; radius, 30 mm) which was fabricated on the basis of the theoretical calculation sustained up to 0.43 MPa (pressure difference) in hydraulic pressure burst testing. Deflection of this foil was 0.2 mm at this pressure. A planar window (diameter, 38 mm; thickness, 30 micrometers ) sustained pressures in the region of 0.25 MPa to 0.49 MPa. Deflections of these foils were in the region of 0.9 mm to 1.4 mm. A deep cylindrical Be window was found to be superior to a planar one in 1 atm. (0.1 MPa) helium gas, in terms of its larger field size and higher transmittance of SR.

Paper Details

Date Published: 9 July 1992
PDF: 10 pages
Proc. SPIE 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II, (9 July 1992); doi: 10.1117/12.136029
Show Author Affiliations
Kouichi Hara, SORTEC Corp. (Japan)
Tohru Itoh, SORTEC Corp. (Japan)

Published in SPIE Proceedings Vol. 1671:
Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II
Martin C. Peckerar, Editor(s)

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