A new large format (512 X 512) charge injection device (CU)) imager was designed and fabricated for use in spectroscopy and other scientific instrumentation applications. Because of its large pixel size (28 urn X 28 urn) the imager design features wide dynamic range and extended spectral response. Additionally a pre-amplifier per row read-out architecture is employed to reduce read-out noise by an order of magnitude from that of a conventional read-out architecture. Initially the imager was fabricated using a commercial oxide-nitride CD process. Eventually an all-oxide CD process will be employed to fabricate the imager. The removal of the nitride is projected to reduce further the read-out noise as well as optimize the UV response. The imager is being integrated in an existing CPU-based scientific instrumentation camera. Among the features that will be demonstrated are: wide dynamic range low read-out noise improved spectral response virtually no-blooming random-access capability true non-destructive read-out and adaptive integration time. 1.

Date Published: 12 August 1992
PDF: 9 pages
Proc. SPIE 1656, High-Resolution Sensors and Hybrid Systems, (12 August 1992); doi: 10.1117/12.135930

Published in SPIE Proceedings Vol. 1656:
High-Resolution Sensors and Hybrid Systems
Morley M. Blouke; Winchyi Chang; Laurence J. Thorpe; Rajinder P. Khosla, Editor(s)