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Proceedings Paper

Recent advances in short-wavelength AR coatings for thinned CCDs
Author(s): Morley Blouke; Michael D. Nelson; M. Serra; Andre Knoesen; B. Higgins; W. Alan Delamere; Gary L. Womack; James S. Flores; T. M. Duncan; R. Reed
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Paper Abstract

This paper discusses the development of two materials as AR coatings for thinned backilluminated charge-coupled devices. The first material is the heavy metal oxide Ta205 deposited as a spin on layer using sol-gel technology. The second material is Si3N4. Both these films have the high index of refraction and low absorption coefficients needed to produce good AR coatings in the near UV down to 300 nm. The goal of the program was to produce a coating which would yield devices with quantum efficiencies of greater than 50 at 300 nm. Both these materials satisfy this goal. Data on test devices will be reported. . 1.

Paper Details

Date Published: 12 August 1992
PDF: 11 pages
Proc. SPIE 1656, High-Resolution Sensors and Hybrid Systems, (12 August 1992); doi: 10.1117/12.135928
Show Author Affiliations
Morley Blouke, Tektronix, Inc. (United States)
Michael D. Nelson, Tektronix, Inc. (United States)
M. Serra, Univ. of California/Davis (United States)
Andre Knoesen, Univ. of California/Davis (United States)
B. Higgins, Univ. of California/Davis (United States)
W. Alan Delamere, Ball Aerospace Systems Group (United States)
Gary L. Womack, Ball Aerospace Systems Group (United States)
James S. Flores, Ball Aerospace Systems Group (United States)
T. M. Duncan, Ball Aerospace Systems Group (United States)
R. Reed, National Optical Atronomy Observatories (United States)

Published in SPIE Proceedings Vol. 1656:
High-Resolution Sensors and Hybrid Systems
Morley M. Blouke; Winchyi Chang; Laurence J. Thorpe; Rajinder P. Khosla, Editor(s)

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