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Proceedings Paper

Solid immersion lens photon tunneling microscope (Invited Paper)
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Paper Abstract

We have demonstrated a new type of near-field microscope that uses an add-on lens, called a solid immersion lens, to a real-time Nipkow disk type of confocal scanning optical microscope. Using this microscope, a factor of two improvement in the edge response over a confocal microscope has been observed along with excellent images of a grating with 100 nm strips and spaces. This microscope operates in reflection and gives real-time images.

Paper Details

Date Published: 1 February 1992
PDF: 9 pages
Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); doi: 10.1117/12.134882
Show Author Affiliations
Gordon S. Kino, Stanford Univ. (United States)
Scott M. Mansfield, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 1556:
Scanning Microscopy Instrumentation
Gordon S. Kino, Editor(s)

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