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Proceedings Paper

Measurement of radius of concave mirror by zone-plate interferometer
Author(s): Zhi Qiang Liu; Katsuyuki Okada; Jumpei Tsujiuchi
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Paper Abstract

Interferometers always measure the relative phase distribution of a sample to a reference subject, and absolute measurement of the sample is difficult unless the exact shape of the reference phase distribution is known. A method of differential interferometer, in which the differences of two interferograms obtained before and after the slight change of parameters in the optical configuration is measured, can be used to measure the shape of the sample without the exact knowledge of the reference phase distribution. This method is applied for measuring the radius of curvature of a Newton gauge.

Paper Details

Date Published: 20 October 1992
PDF: 4 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132153
Show Author Affiliations
Zhi Qiang Liu, Chiba Univ. (Japan)
Katsuyuki Okada, Chiba Univ. (Japan)
Jumpei Tsujiuchi, Chiba Univ. (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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