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Proceedings Paper

Fabrication and testing of grazing incidence mirrors for hard x rays
Author(s): Fumihiko Uchida; Yoshio Suzuki
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Paper Abstract

Diamond-cut flat mirrors with controlled surface roughness are evaluated by measuring the angular distributions of x-ray scattering in the hard x-ray region (1 Angstrom). The reflection profile, for a glancing angle of 1 mrad, has a sharp peak with a FWHM of less than 10 (mu) rad. This has a potential application to a hard x-ray microprobe with a sub-micrometers spot. The reflection profile includes subpeaks due to surface undulations of about a 6 mm period equal to the ball screw lead of the cutting machine. However, small pitches in the surface roughness, such as the tool feed (15 micrometers ), do not affect the peak profile of the reflection beam, because the diffraction angle is detected at more than 1 mrad away from the specular reflection angle.

Paper Details

Date Published: 20 October 1992
PDF: 8 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132134
Show Author Affiliations
Fumihiko Uchida, Hitachi, Ltd. (Japan)
Yoshio Suzuki, Hitachi, Ltd. (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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