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Proceedings Paper

Fabrication of Wolter type I mirror for soft x-ray
Author(s): Tetsuji Onuki; Katsumi Sugisaki; Sadao Aoki
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Paper Abstract

Soft X-ray microscopy, especially using the wavelength region from 2.4nxn to 4.4nxn, is expected in biology. Because the microstructure of live and thick biological specimens containing water can be observed by x-ray absorption difference of protein and water with low damage. The final goal of this work is to produce an imaging x-ray microscope for biological studies.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132133
Show Author Affiliations
Tetsuji Onuki, Nikon Corp. (Japan)
Katsumi Sugisaki, Nikon Corp. (Japan)
Sadao Aoki, Univ. of Tsukuba (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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