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Proceedings Paper

X-ray multilayer mirrors for grazing incidence
Author(s): Masaaki Sudoh; Katsunobu Ueda; Shinichi Nakamura; Hirobumi Ohmori
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Paper Abstract

Material pairs of Re/Al, Re/Mg, Re/B, Pt/B, and Pt/C were selected for grazing incidence multilayer mirrors having a high reflectance for about 1 nm wavelength x ray. The multilayers were fabricated by electron beam deposition and Knudsen cell heating deposition, and were evaluated as to whether or not they had a periodic structure and stability in atmospheric storage. A periodic structure was observed in the transmission electron micrograph for the Pt/C and the Re/B multilayers, although the Re/B multilayer was found to have a decay after a month of fabrication. This decay was caused by the formation of an Re oxide as judged from the x-ray photoelectron spectroscopy analysis.

Paper Details

Date Published: 20 October 1992
PDF: 7 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132126
Show Author Affiliations
Masaaki Sudoh, Toshiba Corp. (Japan)
Katsunobu Ueda, Toshiba Corp. (Japan)
Shinichi Nakamura, Toshiba Corp. (Japan)
Hirobumi Ohmori, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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