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Proceedings Paper

Super-smooth surface polishing on aspherical optics
Author(s): Manabu Ando; Mahito Negishi; Masafumi Takimoto; Akinobu Deguchi; Nobuo Nakamura; Makoto Higomura; Hironori Yamamoto
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Paper Abstract

The study of microscopes for shortwave light such as X rays has made much progress in recent years. Accordingly, the demand for a super-smooth aspherical optical element is increasing. The purpose of this research is to achieve a 0.08 p m or less surface figure error (relative accuracy 1O),and a 0.2 nm rms or less surface roughness on freeform surface optical elements of 500 mm in diameter or more. In order to improve the degree of surface roughness, we used a local pitch polishing method that had a profile generation possibility. A surface roughness of less than O.O6nm rms was achieved in the end of 1990 using the fused silica. In order to improve figure accuracy and ripple, we developed the Canon Super Smooth Polisher (CSSP)(Fig.1) which corrects the figure error by an on-machine measurement and developed a profile generating algorithm by early 1991. In this paper, we describe the results of studies on super-smooth polishing methods and the evaluation results of the CSSP system.

Paper Details

Date Published: 20 October 1992
PDF: 12 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132106
Show Author Affiliations
Manabu Ando, Canon Inc. (Japan)
Mahito Negishi, Canon Inc. (Japan)
Masafumi Takimoto, Canon Inc. (Japan)
Akinobu Deguchi, Canon Inc. (Japan)
Nobuo Nakamura, Canon Inc. (Japan)
Makoto Higomura, Canon Inc. (Japan)
Hironori Yamamoto, Canon Inc. (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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