Proceedings Paper
Formation of submicron diffused layers by multipulse incoherent light treatment| Format | Member Price | Non-Member Price |
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Paper Abstract
In this paper the results on the formation of submicron doped layers by multipulse light treatment are presented.
Paper Details
Date Published: 1 August 1992
PDF: 5 pages
Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131046
Published in SPIE Proceedings Vol. 1783:
International Conference of Microelectronics: Microelectronics '92
Andrzej Sowinski; Jan Grzybowski; Witold T. Kucharski; Ryszard S. Romaniuk, Editor(s)
PDF: 5 pages
Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131046
Show Author Affiliations
Il'dus B. Khaibullin, Kazan Physical-Technical Institute (Russia)
Yakh'ya V. Fattakhov, Kazan Physical-Technical Institute (Russia)
Published in SPIE Proceedings Vol. 1783:
International Conference of Microelectronics: Microelectronics '92
Andrzej Sowinski; Jan Grzybowski; Witold T. Kucharski; Ryszard S. Romaniuk, Editor(s)
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