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Proceedings Paper

Transition layers between CVD diamond films and substrates of strong carbide-forming elements: vanadium, chromium, zirconium, and hafnium
Author(s): Xiang-Liu Jiang; Fang-Qing Zhang; Ya-Fei Zhang; Wen-Jun Zhang; Guang-Hua Chen
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Paper Abstract

Among the strong carbide forming elements, ten of them have melting points above 1400 degrees Centigrade. The observed transition layers between CVD diamond films and the substrates of Mo, Si, W, Ta, Nb, and Ti have been reported previously. In this paper, further research results on transition layers for the substrate elements of V, Cr, Zr, and Hf are presented. The specimens are prepared in an arc discharge plasma CVD system with the substrate temperature of 900 - 1000 degrees Centigrade and characterized by a high resolution X-ray diffusion diffraction instrument. the experimental results show that the transition layers are polycrystalline VC and V2C, Cr7C3 and HfC for the substrates of V, Cr, and Hf respectively. For the transition layers between CVD diamond films and Zr substrates, the composition of polycrystalline ZrH, ZrC, and their complex compound are verified and the content of hydride is comparable to the content of carbide in this case.

Paper Details

Date Published: 20 November 1992
PDF: 9 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130777
Show Author Affiliations
Xiang-Liu Jiang, Beijing Institute of Science and Technology (United States)
Fang-Qing Zhang, Lanzhou Univ. (China)
Ya-Fei Zhang, Lanzhou Univ. (China)
Wen-Jun Zhang, Lanzhou Univ. (China)
Guang-Hua Chen, Lanzhou Univ. (China)

Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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