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Proceedings Paper

Characterization of electron cyclotron resonance plasmas for diamond deposition
Author(s): Shu Jin; Richard Molnar; Donald Y. Jong; Theodore D. Moustakas
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Paper Abstract

Langmuir probe measurements and optical emission spectroscopy were employed to characterize electron cyclotron resonance plasmas with two different magnetic field configurations. The plasma ternperature was directly measured by a thermocouple immersed inside the plasmas. To deposit diamond at low pressure( lOOmTorr) it is required for the feed sources to contain a large amount of carbon as well as OH radicals. However, the C, H, and 0 ratios still fall into the "diamond domain" of Bachmann's diagram. The oxygen addition to the CHiJH2 plasma leads to the improvement of diamond films prepared at 800mTorr, which is due to the OH radicals formed in the plasma. The addition of oxygen does not increase the plasma temperature. Our results of ECR diamond deposition under various pressures support that neutral-neutral reactions dominate in diamond growth process.

Paper Details

Date Published: 20 November 1992
PDF: 9 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130760
Show Author Affiliations
Shu Jin, Boston Univ. (United States)
Richard Molnar, Boston Univ. (United States)
Donald Y. Jong, Boston Univ. (United States)
Theodore D. Moustakas, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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