Share Email Print

Proceedings Paper

New design of silicon organic materials and processes for microelectronics (Invited Paper)
Author(s): P. A. Averichkin; A. I. Maslakov; Kamil A. Valiev; Leonid V. Velikov
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

In present time six types of siliconorganic materials are commonly used in microelectronic, technology: polysiloxanes, polysilozanes, polysilmethylenes, polysilphenylenes, organic polymers with silicon getheroathorns and polysilanes [1].

Paper Details

Date Published: 1 June 1992
PDF: 33 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130374
Show Author Affiliations
P. A. Averichkin, Institute of Physics and Technology (Russia)
A. I. Maslakov, Institute of Physics and Technology (Russia)
Kamil A. Valiev, Institute of Physics and Technology (Russia)
Leonid V. Velikov, Institute of Physics and Technology (Russia)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?