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Proceedings Paper

Design and performance of a production-worthy excimer-laser-based stepper
Author(s): ; Christopher Sparkes; Peter A. DiSessa; David J. Elliott
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Paper Abstract

Excimer-laser-based steppers have matured to a production-worthy state. Widefield high-NA lenses have been developed and characterized for imaging down to 0.35 micron and below. Excimer lasers have attained practical levels of performance capability and stability, reliability, safety, and operating cost Excimer stepper system integration and control issues such as focus, exposure, and overlay stability have been addressed. Enabling support technologies - resist systems, resist processing, metrology and conventional mask making - continue to progress and are becoming available. This paper will discuss specific excimer stepper design challenges, and will present characterization data from several field installations of XLS™ deep-UV steppers configured with an advanced lens design.

Paper Details

Date Published: 1 June 1992
PDF: 17 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130362
Show Author Affiliations
, GCA-General Signal Corp. (United States)
Christopher Sparkes, GCA-General Signal Corp. (United States)
Peter A. DiSessa, GCA-General Signal Corp. (United States)
David J. Elliott, Cymer Laser Technologies (United States)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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