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Proceedings Paper

Shape effects of edge-line phase shifter on light intensity contrast
Author(s): Mitsunori Nakatani; Hirofumi Nakano; Haruhiko Kusunose; Kazuya Kamon; Shuichi Matsuda; Yaichiro Watakabe; Hirozo Takano; Mutuyuki Otsubo
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Paper Abstract

By using two-dimensional simulation, dependence of light intensity contrast on numerical aperture (NA), coherence factor (a) of i-line stepper, shifter-width, phase error and slope angle of phase shifter edges have been investigated. For the slope angle of 90° and the shifter phase of 180°, the highest contrast is obtained for NA=0.65 and a=0.3. As the slope angle becomes to be small, contrast degrades remarkably for high NA(=0.65). On these simulation, 0.18pm resolution limit of isolated space pattern is successfully realized using an image reversal resist process.

Paper Details

Date Published: 1 June 1992
PDF: 9 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130350
Show Author Affiliations
Mitsunori Nakatani, Mitsubishi Electric Corp. (Japan)
Hirofumi Nakano, Mitsubishi Electric Corp. (Japan)
Haruhiko Kusunose, Mitsubishi Electric Corp. (Japan)
Kazuya Kamon, Mitsubishi Electric Corp. (Japan)
Shuichi Matsuda, Mitsubishi Electric Corp. (Japan)
Yaichiro Watakabe, Mitsubishi Electric Corp. (Japan)
Hirozo Takano, Mitsubishi Electric Corp. (Japan)
Mutuyuki Otsubo, Mitsubishi Electric Corp. (Japan)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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