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Proceedings Paper

Phase shift reflectometry for sub-surface defect detection
Author(s): Anand Asundi; Huang Lei; Teoh Kang Min Eden; Parthasarathy Sreemathy; Watt Sook May
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Paper Abstract

Phase Shift Reflectometry has recently been seen as a novel alternative to interferometry since it can provide warpage measurement over large areas with no need for large optical components. To confirm its capability and to explore the use of this method for sub-surface defect detection, a Chinese magic mirror is used. This bronze mirror which dates back to the Chinese Han Dynasty appears at first sight to be an ordinary convex mirror. However, unlike a normal mirror, when illuminated by a beam of light, an image is formed onto a screen. It has been hypothesized that there are indentations inside the mirror which alter the path of reflected light rays and hence the reflected image. This paper explores various methods to measure these indentations. Of the methods test Phase Shift Reflectometry (PSR) was found suitable to be the most suitable both in terms of the sensitivity and the field of view.

Paper Details

Date Published: 6 December 2012
PDF: 4 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630G (6 December 2012); doi: 10.1117/12.1000032
Show Author Affiliations
Anand Asundi, Nanyang Technological Univ. (Singapore)
Huang Lei, Nanyang Technological Univ. (Singapore)
Teoh Kang Min Eden, Raffles Girls' School Secondary (Singapore)
Parthasarathy Sreemathy, Raffles Girls' School Secondary (Singapore)
Watt Sook May, Raffles Girls' School Secondary (Singapore)

Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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