
Proceedings Paper
Phase shift reflectometry for sub-surface defect detectionFormat | Member Price | Non-Member Price |
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Paper Abstract
Phase Shift Reflectometry has recently been seen as a novel alternative to interferometry since it can provide warpage
measurement over large areas with no need for large optical components. To confirm its capability and to explore the use
of this method for sub-surface defect detection, a Chinese magic mirror is used. This bronze mirror which dates back to
the Chinese Han Dynasty appears at first sight to be an ordinary convex mirror. However, unlike a normal mirror, when
illuminated by a beam of light, an image is formed onto a screen. It has been hypothesized that there are indentations
inside the mirror which alter the path of reflected light rays and hence the reflected image. This paper explores various
methods to measure these indentations. Of the methods test Phase Shift Reflectometry (PSR) was found suitable to be
the most suitable both in terms of the sensitivity and the field of view.
Paper Details
Date Published: 6 December 2012
PDF: 4 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630G (6 December 2012); doi: 10.1117/12.1000032
Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)
PDF: 4 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630G (6 December 2012); doi: 10.1117/12.1000032
Show Author Affiliations
Anand Asundi, Nanyang Technological Univ. (Singapore)
Huang Lei, Nanyang Technological Univ. (Singapore)
Teoh Kang Min Eden, Raffles Girls' School Secondary (Singapore)
Huang Lei, Nanyang Technological Univ. (Singapore)
Teoh Kang Min Eden, Raffles Girls' School Secondary (Singapore)
Parthasarathy Sreemathy, Raffles Girls' School Secondary (Singapore)
Watt Sook May, Raffles Girls' School Secondary (Singapore)
Watt Sook May, Raffles Girls' School Secondary (Singapore)
Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)
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